Chemistry of Atomic Layer Deposition - Paperback
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Availability:In StockContributor:Seán Thomas BarrySeries:de Gruyter TextbookPublish date:2021-11-22Pages:113
Language:EnglishPublisher:de GruyterISBN-13:9783110712513ISBN-10:3110712512UPC:9783110712513Book Category:Technology & Engineering, ScienceBook Subcategory:Materials Science, Chemistry, ElectronicsBook Topic:Metals & Alloys, Inorganic, MicroelectronicsSize:9.61 x 6.69 x 0.24 inchesWeight:0.4299Product ID:SCNW1WFYSY
This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.
Language:EnglishPublisher:de GruyterISBN-13:9783110712513ISBN-10:3110712512UPC:9783110712513Book Category:Technology & Engineering, ScienceBook Subcategory:Materials Science, Chemistry, ElectronicsBook Topic:Metals & Alloys, Inorganic, MicroelectronicsSize:9.61 x 6.69 x 0.24 inchesWeight:0.4299Product ID:SCNW1WFYSY
Seán Thomas Barry, Carleton University, Ottawa, Canada.
Publisher: de Gruyter
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