Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure - Paperback
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Language:EnglishPublisher:Books on DemandISBN-13:9783750431423ISBN-10:3750431426UPC:9783750431423Book Category:ScienceBook Subcategory:PhysicsBook Topic:Condensed MatterSize:8.27 x 5.83 x 0.38 inchesWeight:0.4894Product ID:SCYHEY9527
Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure
The usage of piezoelectric and ferroelectric thin films is a promising approach to significantly increase the functionality of microelectromechanical systems (MEMS) as well as of microelectronics in general. Since the device performance thus becomes directly connected to the properties of the functional film, new as well as improved piezoelectric and ferroelectric materials can allow substantial...
Language:EnglishPublisher:Books on DemandISBN-13:9783750431423ISBN-10:3750431426UPC:9783750431423Book Category:ScienceBook Subcategory:PhysicsBook Topic:Condensed MatterSize:8.27 x 5.83 x 0.38 inchesWeight:0.4894Product ID:SCYHEY9527
Simon Fichtner did his M.Sc. in theoretical solid state physics and his PhD on AlScN thin films at the Institute for Material Science, Kiel University. His research interests include piezo- & ferroelectric thin films and their applications to microelectromechanical systems and microelectronics.
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